Fine Stepping Piezo Actuator (FSPA35XS) is a patented actuator that combines SPA technology with mechanical reduction. Step sizes lower than 100nm are achievable in fine displacement. Typical max speed for this FSPA is 200 um/s.
| Actuation force | Travel range | Typical lifetime |
|---|---|---|
| >100 N | 5 mm | 100 cycles |
Preliminary
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