The piezoelectric stage XY200M is based on the APA 200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes.
Max No-load displacement | Dimensions | Unloaded resonance frequency | Response time |
---|---|---|---|
200 µm | 100*100*22 mm | 580 Hz | 0.86 ms |
Standard
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