Piezo stages

Mainly based on the APA® concept, CEDRAT TECHNOLOGIES has developed different mechanisms in order to fulfill its customers' requests for several degrees of freedom kinematics. These mechanisms take advantage of the APA® concept offering a reliable, robust, precise and compact solution to its users. These Standard mechanisms are currently available in order to meet various needs in terms of kinematics and force.

  • X piezo stages: single axis piezo stages take advantage from the characteristics of APA® actuators and flexure guiding to offer excellent compactness, robustness, bandwidth and resolution,
  • XY piezo stages: the two axis stages can be equipped with strain gauges for very fine positioning or closed loop control,
  • XYZ piezo stages: two axis stages can receive athird motion axis for three degrees freedom.

To obtain more information on our products feel free to ask for our Piezo & Magnetic Products Catalogue and/or contact us.

Piezoelectric stage - X60S

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Description
The piezoelectric stage X60S has a stroke up to 110µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm.
Performances
Max No-load displacement(µm):55; Heigth (mm): 12; Dimensions (mm):30*30; Unloaded resonance frequency(Hz): 1840; Response time: 0.27
Available options
Strain gauges, Vacuum
Status
Preliminary
Piezoelectric stage picture

Piezoelectric stage - X120S

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Description
The piezoelectric stage X120S has a stroke up to 110µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm.
Performances
Max No-load displacement(µm):138; Heigth (mm): 12; Dimensions (mm):30*30; Unloaded resonance frequency(Hz): 850; Response time: 0.59
Available options
Strain gauges, Vacuum
Status
Preliminary
Piezoelectric stage picture

Piezoelectric stage - XY25XS

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Description
The piezoelectric stage XY25XS is based on the APA 25XS actuators. The compact XY25XS stage is well suited to integrated devices for fiber positioning, micro scanning.
Performances
Max displacement (µm): 25; Dimensions (mm): 20*50*50; Unloaded resonance frequency (Hz): 3000;
Available options
Strain Gauges, Vacuum, Eddy current sensor
Status
Standard
Piezoelectric stage picture

Piezoelectric stage - XY200M

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Description
The piezoelectric stage XY200M is based on the APA 200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes.
Performances
Max No-load displacement (µm): 200; Dimensions (mm): 22*100*100; Resolution (nm): 2.0; Unloaded resonance frequency (Hz): 580;
Available options
Strain Gauges; Eddy Current Sensors, Vacuum
Status
Standard
Piezoelectric stage picture

Piezoelectric stage - XYZ200M

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Description
The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection
Performances
Max no load displacement (µm): 180; Height(mm): 44; Dimensions (mm): 100*100; Resolution (nm): 1,8; Unloaded resonance frequency (Hz): 380; Response time (ms): 1,32
Available options
Strain Gauges; Eddy Current Sensors, Vacuum
Status
Standard
Piezoelectric stage picture