Piezo Stages

Mainly based on the APA® concept, CEDRAT TECHNOLOGIES has developed different mechanisms in order to fulfill its customers' requests for several degrees of freedom kinematics. These mechanisms take advantage of the APA® concept offering a reliable, robust, precise and compact solution to its users. These Standard mechanisms are currently available in order to meet various needs in terms of kinematics and force.

X piezo stages: single axis piezo stages take advantage from the characteristics of APA® actuators and flexure guiding to offer excellent compactness, robustness, bandwidth and resolution,
XY piezo stages: the two axis stages can be equipped with strain gauges for very fine positioning or closed loop control,
XYZ piezo stages: two axis stages can receive athird motion axis for three degrees freedom.

To obtain more information on our products feel free to ask for our Piezo & Magnetic Products Catalogue and/or contact us.

Piezoelectric stage - X60S

Description: The piezoelectric stage X60S has a stroke up to 110µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm.
Performances: Max No-load displacement(µm):55; Dimensions (mm):30*30*12; Unloaded resonance frequency(Hz): 1840; Response time: 0.27
Available options: Strain gauges, Vacuum
Status: Preliminary

Piezoelectric stage - X120S

Description: The piezoelectric stage X120S has a stroke up to 110µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm.
Performances: Max No-load displacement(µm):110; Dimensions (mm):30*30*12; Unloaded resonance frequency(Hz): 850; Response time: 0.59
Available options: Strain gauges, Vacuum
Status: Preliminary

Piezoelectric stage - XY25XS

Description: The piezoelectric stage XY25XS is based on the APA 25XS actuators. The compact XY25XS stage is well suited to integrated devices for fiber positioning, micro scanning.
Performances: Max displacement (µm): 25; Dimensions (mm): 50*50*19; Unloaded resonance frequency (Hz): 3000;
Available options: Strain Gauges, Vacuum, Eddy current sensor
Status: Standard

Piezoelectric stage - XY200M

Description: The piezoelectric stage XY200M is based on the APA 200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes.
Performances: Max No-load displacement (µm): 200; Dimensions (mm): 100*100*22; Resolution (nm): 2.0; Unloaded resonance frequency (Hz): 580;
Available options: Strain Gauges; Eddy Current Sensors, Vacuum
Status: Standard

Piezoelectric stage - XYZ200M

Description: The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection
Performances: Max no load displacement (µm): 200; Dimensions (mm): 100*100*49; Resolution (nm): 1,8; Unloaded resonance frequency (Hz): 380; Response time (ms): 1,32
Available options: Strain Gauges; Eddy Current Sensors, Vacuum
Status: Standard