The piezoelectric stage X60S has a stroke up to 110µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm.
| Max No-load displacement | Dimensions | Unloaded resonance frequency | Response time |
|---|---|---|---|
| 55 µm | 30*30*12 mm | 1840 Hz | 0.27 ms |
Preliminary
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