Cedrat Technologies, innovation in mechatronicsCedrat Technologies, innovation in mechatronics

Cedrat Technologies, innovation in mechatronics


Description

The piezoelectric stage XY200M is based on the APA 200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes.

Performances

Max No-load displacement Dimensions Unloaded resonance frequency Response time
200 µm 100*100*22 mm 580 Hz 0.86 ms

Available options

  • Straing gauges
  • Vacuum
  • Eddy current sensor

Status

Standard