Cedrat Technologies, innovation in mechatronicsCedrat Technologies, innovation in mechatronics

Cedrat Technologies, innovation in mechatronics


Description

The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection.

Performances

Max No-load displacement Dimensions Unloaded resonance frequency Response time
200 µm 100*100*49 mm 380 Hz 1.32 ms

Available options

  • Straing gauges
  • Vacuum
  • Eddy current sensor

Status

Standard