The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection.
| Max No-load displacement | Dimensions | Unloaded resonance frequency | Response time |
|---|---|---|---|
| 200 µm | 100*100*49 mm | 380 Hz | 1.32 ms |
Standard
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