Active clamping
Blocked Force (N) | Capacitance (µF) | Stroke (µm) | Stiffness (N/µm) | Resonance Blocked Free (Hz) |
---|---|---|---|---|
380 | 6.2 | 56 | 6.8 | 3120 |
SG sensor | Non magnetic shell | Vacuum compatibility |
---|---|---|
Yes | No | Yes |
Standard
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