Active control of vibration - Oval piston machining - Heavy local positioning
Blocked Force (N) | Capacitance (µF) | Stroke (µm) | Stiffness (N/µm) | Resonance Blocked Free (Hz) |
---|---|---|---|---|
4700 | 40 | 130 | 36.3 | 3260 |
SG sensor | Non magnetic shell | Vacuum compatibility |
---|---|---|
Yes | Yes | Yes |
Standard