Active control of vibration - Oval piston machining - Heavy local positioning
| Blocked Force (N) | Capacitance (µF) | Stroke (µm) | Stiffness (N/µm) | Resonance Blocked Free (Hz) |
|---|---|---|---|---|
| 4700 | 13 | 44 | 107 | 8320 |
| SG sensor | Non magnetic shell | Vacuum compatibility |
|---|---|---|
| Yes | Yes | Yes |
Standard
