Active control of vibration - Oval piston machining - Heavy local positioning
| Blocked Force (N) | Capacitance (µF) | Stroke (µm) | Stiffness (N/µm) | Resonance Blocked Free (Hz) |
|---|---|---|---|---|
| 4700 | 18 | 85 | 54.1 | 4670 |
| SG sensor | Non magnetic shell | Vacuum compatibility |
|---|---|---|
| Yes | Yes | Yes |
Standard
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