Platines piezo

Mainly based on the APA® concept, CEDRAT TECHNOLOGIES has developed different mechanisms in order to fulfill its customers' requests for several degrees of freedom kinematics. These mechanisms take advantage of the APA® concept offering a reliable, robust, precise and compact solution to its users. These Standard mechanisms are currently available in order to meet various needs in terms of kinematics and force.

  • X piezo stages: single axis piezo stages take advantage from the characteristics of APA® actuators and flexure guiding to offer excellent compactness, robustness, bandwidth and resolution,
  • XY piezo stages: the two axis stages can be equipped with strain gauges for very fine positioning or closed loop control,
  • XYZ piezo stages: two axis stages can receive athird motion axis for three degrees freedom.

To obtain more information on our products feel free to ask for our Piezo & Magnetic Products Catalogue and/or contact us.

Piezoelectric stage - X60S

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Description

The piezoelectric stage X60S has a stroke up to 110µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm.

Performance

Max No-load displacement(µm):55; Heigth (mm): 12; Dimensions (mm):30*30; Unloaded resonance frequency(Hz): 1840; Response time: 0.27

Available options

Strain gauges, Vacuum

Status
Preliminary
Piezoelectric stage picture

Piezoelectric stage - X120S

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Description

The piezoelectric stage X120S has a stroke up to 110µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm.

Performance

Max No-load displacement(µm):138; Heigth (mm): 12; Dimensions (mm):30*30; Unloaded resonance frequency(Hz): 850; Response time: 0.59

Available options

Strain gauges, Vacuum

Status
Preliminary
Piezoelectric stage picture

Platine piézoélectrique - XY25XS

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Description

La platine piézoélectrique XY25XS est basée sur les actionneurs de type APA 25XS. Cette platine de taille compact convient particulièrement aux systèmes intégrés pour le positionnement de fibres, le microscan de lentilles et de détecteurs CCD ou CMOS.

Performance

Déplacement max (µm): 25; Dimensions (mm): 20*50*50; Fréquence de résonance à vide (Hz): 3000

Available options

Strain Gages

Status
Standard
Platine piézoélectrique picture

Platine piézoélectrique - XY200M

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Description

La platine piézoélectrique XY200M est basée sur les actionneurs APA200M et jouit d'une grande rigidité. Parmi ses applications on peut citer le positionnement de masque, les microscopes à balayage, à force atomique et les pinces optiques.

Performance

Déplacement max à vide (µm): 200; Dimensions (mm): 22*100*100; Résolution (nm): 2.0; Fréquence de résonance à vide (Hz): 580

Available options

Strain Gages; Eddy Current Sensors, Vacuum

Status
Standard
Platine piézoélectrique picture

Piezoelectric stage - XYZ200M

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Description

The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection

Performance

Max no load displacement (µm): 180; Height(mm): 44; Dimensions (mm): 100*100; Resolution (nm): 1,8; Unloaded resonance frequency (Hz): 380; Response time (ms): 1,32

Available options

Strain Gauges; Eddy Current Sensors, Vacuum

Status
Standard
Piezoelectric stage picture